1. To cite an example, SiScan instruments of Campbell California tried to build a CSLM using a HeCd laser operating at 440 nm for measuring the dimensions of small structures on semiconductor substrates. They found, however, that intensity fluctuations in the laser prevented them from achieving the desired repeatability of the measurements.
2. A confocal beam scanning white light microscope;Hell;Journal of Microscopy,1991
3. Characterization of a real-time confocal scanning optical microscope;Corle;SPIE,1989
4. Three-dimensional image sensing by chromatic confocal microscopy;Tiziani;Appl. Opt.,1994