Development of accurate dose evaluation technique of X-ray inspection for quality assurance of semiconductor with Monte Carlo simulation-Reference-Cited by-同舟云学术

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Development of accurate dose evaluation technique of X-ray inspection for quality assurance of semiconductor with Monte Carlo simulation

Published:2019-12 Issue: Volume:154 Page:108851
ISSN:0969-8043
Container-title:Applied Radiation and Isotopes
language:en
Short-container-title:Applied Radiation and Isotopes

Author:

Park Hyojun,Choi Hyun Joon,Rhew Keunho,Lim Heonsang,Lee Hyunyoung,Jang Iloh,Min Chul Hee

Funder

Samsung Electronics

Publisher

Elsevier BV

Subject

Radiation

Reference10 articles.

1. From fifteen to two hundred NDT-Methods in fifty years;Aastroem,2008

2. Considerations for minimizing radiation doses to components during X-ray inspection;Bernard,2003

3. Calibration OF low energy X-ray experimental setup with strongly filtered beam using data from a semiconductor and a thermoluminescent detectors;Czub;Radiat. Prot. Dosim.,2019

4. X-ray radiation effect in DRAM retention time;Ditali;IEEE Trans. Device Mater. Reliab.,2007

5. Radiation damage of semiconductor device by X-ray;Kim;J. Radiat. Prot. Res.,2015

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Vignetting Dimensional Geometric Models and a Downhill Simplex Search;CURR OPT PHOTONICS;2022

2. Monte Carlo simulations of PVC films loaded with microparticles of MgB4O7 to detect albedo neutrons;Radiation Measurements;2020-06

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