Investigation properties of Au–porous a-Si0.70C0.30 as humidity sensor

Author:

Boukezzata Assia,Keffous Aissa,Nezzal Ghania,Gabouze Noureddine,Kechouane Mohamed,Zaafane Kahina,Hammouda Amirouche,Simon Patrick,Menari Hamid

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference34 articles.

1. Recent achievements in miniaturised humidity sensors – a review of transduction techniques;Rittersma;Sensors and Actuators A: Physical,2002

2. Thick film humidity sensor based on (Ba, Sr) TiO3 porous ceramic doped with MgO and CaO;Slunecko;Sensors and Actuators B: Chemical,1992

3. G.M. O’Halloran, Capacitive humidity sensor based on porous silicon, PhD Thesis, Delft University of Technology, Delft, Netherlands, 1999.

4. Investigation of relative humidity sensors based on porous silicon, porous polysilicon and porous silicon carbide;Connolly,2001

5. Investigation properties of a-Si1−xCx:H films elaborated by co-sputtering of Si and 6H-SiC;Keffous;Modern Physics Letters B,2010

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