A transparent ZnO nanowire MEMS gas sensor prepared by an ITO micro-heater-Reference-Cited by-同舟云学术

A transparent ZnO nanowire MEMS gas sensor prepared by an ITO micro-heater

Published:2020-02 Issue: Volume:304 Page:127319
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Hsueh Ting-Jen,Peng Chien-Hua,Chen Wei-Shou

Funder

Ministry of Science and Technology, Taiwan

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference37 articles.

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