Meso-scale ceramic hotplates – A playground for high temperature microsystems-Reference-Cited by-同舟云学术

Meso-scale ceramic hotplates – A playground for high temperature microsystems

Published:2015-12 Issue: Volume:221 Page:823-834
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Jiang Bo,Muralt Paul,Maeder Thomas

Funder

Swiss National Science Foundation

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference61 articles.

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