Detection of gas trace of hydrofluoric acid using microcantilever

Author:

Mertens Johann,Finot Eric,Nadal Marie-Hélène,Eyraud Vincent,Heintz Olivier,Bourillot Eric

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Environmental and medical safety in the manufacture of fluorinated organic compounds;Costa;J. Fluorine Chem.,1992

2. J.-B. Sanchez, F. Berger, M. Fromm, M.H. Nadal, V. Eyraud, Semiconductor gas sensor for the detection of hydrogen fluoride, in: Proceedings of the III International Seminar on Semiconductor Gas Sensors SGS’2002, 19–22 September 2002, USTRON, Poland.

3. Porous silicon formation and other photoelectrochemical effects at silicon electrodes anodized in hydrofluoric acid;Lehmann;Appl. Surf. Sci.,1996

4. S. Ballandras, M.H. Nadal, W. Daniau, V. Blondeau-Patissier, V. Eyraud, D. Hauden, B. Guichardaz, L. Hairault, B. Lebret, in: Proceedings of the IEEE 2002 of Toward the Development of an Anhydride Hexafluorhydric Acid Sensor Based on Surface Transverse Wave Devices, 7–11 October 2002, Berlin, Germany.

5. Physical changes on sub-nanogram quantities of platinum dioxide;Maya;Surf. Sci.,1999

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