Excimer-laser deinsulation of Parylene-C coated Utah electrode array tips

Author:

Yoo Je-Min,Sharma Asha,Tathireddy Prashant,Rieth Loren W.,Solzbacher Florian,Song Jong-In

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Characterization of parylene C as an encapsulation material for implanted neural prostheses;Hassler;Journal of Biomedical Materials Research Part B: Applied Biomaterials,2010

2. Parylene as a chronically stable, reproducible microelectrode insulator, biomedical engineering;Loeb;IEEE Transactions on BME,1977

3. Flexible parylene-based multielectrode array technology for high-density neural stimulation and recording;Rodger;Sensors and Actuators B: Chemical,2008

4. Technology insight: future neuroprosthetic therapies for disorders of the nervous system;Normann;Nature Clinical Practice. Neurology,2007

5. Plasma removal of Parylene C;Meng;Journal of Micromechanics and Microengineering,2008

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