In2O3 films deposited by spray pyrolysis as a material for ozone gas sensors

Author:

Korotcenkov G,Cerneavschi A,Brinzari V,Vasiliev A,Ivanov M,Cornet A,Morante J,Cabot A,Arbiol J

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. F.T. Tanasescu, R. Cramariuc, Water depollution using ozone technologies in densely populated urban areas. Achievements, in: S. Radautsan, G. Perissakis (Eds.), Scientific and Technological Achievements Related to the Development of European Cities, NATO ASI Series 4, vol. 9, Kluwer Academic Publishers, Dordrecht, 1997, pp. 169–198.

2. In2O3 and MoO3–In2O3 thin film semiconductor sensors: interaction with NO2 and O3;Gurlo;Sens. Actuators B,1998

3. M. Ivanovskaya, P. Bogdanov, G. Faglia, G. Sberveglieri, Properties of thin film and ceramic sensors for the detection of CO and NO2, in: Proceeding of the International Conference Eurosensors XIII, The Hague, The Netherlands, 12–15 September 1999, pp. 145–148.

4. H. Sfeffes, C. Imawan, F. Solzbacher, E. Obermeier, Reactivity RF-sputtering In2O3 thin films for detection of NO2, in: Proceeding of the International Conference Eurosensors XIII, The Hague, The Netherlands, 12–15 September 1999, pp. 871–874.

5. Peculiarities of SnO2 thin film deposition by spray pyrolysis for gas sensor application;Korotcenkov;Sens. Actuators B,2001

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