Impact of high microwave power on hydrogen impurity trapping in nanocrystalline diamond films grown with simultaneous nitrogen and oxygen addition into methane/hydrogen plasma
Author:
Funder
National Science Foundation
FCT-Portuguese Science and Technology Foundation
European Union
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference33 articles.
1. Three-dimensional kinetic Monte Carlo simulations of diamond chemical vapor deposition
2. Investigation of boron and hydrogen concentrations in p-type diamond films by infrared spectroscopy
3. Nuclear magnetic resonance and infrared absorption studies of hydrogen incorporation in polycrystalline diamond
4. Quantitative correlation of infrared absorption with nuclear magnetic resonance measurements of hydrogen content in diamond films
5. Hydrogen in polycrystalline diamond
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