Effects of horizontal magnetic field position on oxygen control in 12-inch Czochralski silicon
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Published:2024-11
Issue:
Volume:646
Page:127861
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ISSN:0022-0248
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Container-title:Journal of Crystal Growth
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language:en
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Short-container-title:Journal of Crystal Growth
Author:
Lou Zhongshi,
Xue Zixuan,
Yuan ShuaiORCID,
Jia Haiyang,
Li Pengfei,
Yuan Changhong,
Han XuefengORCID,
Yu Xuegong,
Yang Deren