Growth and electrical properties of Pb(Zr,Ti)O3 thin films by a chemical solution deposition method using zirconyl heptanoate as zirconium source
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference24 articles.
1. Ferroelectric Memories
2. Ferroelectric Thin Films in Micro-electromechanical Systems Applications
3. Processing and electrical properties of Pb (ZrxTi1−x)O3(x=0.2–0.75) films: Comparison of metallo‐organic decomposition and sol‐gel processes
4. Growth of epitaxial Pb(Zr,Ti)O3films by pulsed laser deposition
5. Investigation of Pt/Ti bilayer metallization on silicon for ferroelectric thin film integration
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