Metal contamination of silicon from the furnace atmosphere after crystallization

Author:

Kranert C.,Trempa M.,Reimann C.,Friedrich J.

Funder

Bundesministerium für Wirtschaft und Energie

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference24 articles.

1. The effects of Gas-Phase convection on carbon contamination of Czochralski-grown silicon;Bornside;J. Electrochem. Soc.,1995

2. The Impact of Graphite Furnace Parts on Radial Impurity Distribution in Czochralski-Grown Single–Crystal Silicon;Gilmore;J. Electrochem. Soc.,1998

3. Gas-Phase interactions as sources of contamination in solar silicon;Meteleva-Fischer;Metall. Mater. Trans. E,2014

4. N. Stoddard, Device for removing liquid silicon from a crucible (2014).

5. B. Freudenberg, M. Dietrich, M. Timm, R. Ditscherlein, Removing impurities from a melt, comprises providing a crucible with a melt of non-ferrous metal or semiconductor material, directionally solidifying the melt to form solidified block, and removing a portion of residual melt from crucible (2011).

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