Effects of melt depth on oxygen transport in silicon crystal growth by continuous-feeding Czochralski method
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference27 articles.
1. Czochralski growth of silicon crystals;Anttila,2020
2. Kakimoto, K.; Gao, B.; Liu, X.; Nakano, S. J. P. i. C. G.; Materials, C. o. Growth of semiconductor silicon crystals. 2016, 62 (2), 273-285.
3. Ding, J.; Li, Y. J. P. o. F. Three-dimensional characteristics of turbulent flow and heat transfer in Czochralski silicon melt with different cusp magnetic field configurations. 2022, 34 (2), 025117.
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