Protrusions reduction in 3C-SiC thin film on Si

Author:

Zimbone Massimo,Mauceri Marco,Litrico Grazia,Barbagiovanni Eric Gasparo,Bongiorno Corrado,La Via Francesco

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference29 articles.

1. Status of silicon carbide (SiC) as a wide-bandgap semiconductor for high-temperature applications: a review;Casady;Solid State Electron,1996

2. Interface state density evaluation of high quality heteroepitaxial 3C-SiC (001) for high-power MOSFET applications;Anzalone;Mater. Sci. Eng., B,2015

3. Growth and properties of β-SiC single crystals;Nelson;J. Appl. Phys.,1966

4. Growth of single crystalline GaN film on Si substrate using 3C-SiC as an intermediate layer;Takeuchi;J. Cryst. Growth,1991

5. High-quality nanocrystalline cubic silicon carbide emitter for crystalline silicon hetero-junction solar cells;Miyajima;Appl. Phys. Lett.,2010

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