Study on the in-line sputtering growth and structural properties of polycrystalline ZnO:Al on ZnO and glass
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference27 articles.
1. Potential of amorphous silicon for solar cells
2. The effect of front ZnO:Al surface texture and optical transparency on efficient light trapping in silicon thin-film solar cells
3. Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour
4. Electrical, structural and etching characteristics of ZnO:Al films prepared by rf magnetron
5. Degradation characteristics of blue GaN-LED chip related to packages
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4. Influence of unintentionally incorporated Ar atoms on the crystalline polarity of magnetron-sputtered Al-doped ZnO polycrystalline films on glass and sapphire substrates;Journal of Vacuum Science & Technology B;2020-03
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