Study of the thermal decomposition of “captured” intermediates in the CVD of ZnO from DEZ and H2O by TGA–DTA and quadrupole mass spectroscopy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference18 articles.
1. Repeated temperature modulation epitaxy for p-type doping and light-emitting diode based on ZnO
2. Blue Light-Emitting Diode Based on ZnO
3. Progress and prospects of group-III nitride semiconductors
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5. Temperature dependence of structural and optical properties of ZnO films grown on Si substrates by MOCVD
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