Microstructure and grain growth of polycrystalline silicon grown in fluidized bed reactors
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference15 articles.
1. Theoretical analysis and modeling of the obtaining of polycrystalline silicon in a fluidized-bed reactor
2. Silicon deposition from silane or disilane in a fluidized bed—Part II: Theoretical analysis and modeling
3. Chemical Vapor Deposition Model of Polysilicon in a Trichlorosilane and Hydrogen System
4. Heterogeneous Decomposition of Silane in a Fixed Bed Reactor
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