Comparative study of the effects of phosphorus and boron doping in vapor–liquid–solid growth with fixed flow of silicon gas-Reference-Cited by-同舟云学术

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Comparative study of the effects of phosphorus and boron doping in vapor–liquid–solid growth with fixed flow of silicon gas

Published:2016-04 Issue: Volume:440 Page:55-61
ISSN:0022-0248
Container-title:Journal of Crystal Growth
language:en
Short-container-title:Journal of Crystal Growth

Author:

Islam Md. Shofiqul,Mehedi Ibrahim Mustafa

Funder

Integrated Circuit Lab, Toyohashi University of Technology

Grant-in-Aid for Scientific Research

Global COE Program

Ministry of Education, Culture, Sports, Science and Technology of Japan (MEXT)

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference32 articles.

1. Microelectrode Array for Chronic Deep-Brain Microstimulation and Recording

2. Silicon microneedle electrode array with temperature monitoring for electroporation

3. Fabrication and characterization of gold coated hollow silicon microneedle array for drug delivery

4. Measuring brain activity with magnetoresistive sensors integrated in micromachined probe needles

5. VAPOR‐LIQUID‐SOLID MECHANISM OF SINGLE CRYSTAL GROWTH

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Fabrication of pn junction arrays with highly successful grown n-Si microneedles by using low temperature VLS method;Journal of Micromechanics and Microengineering;2021-04-13

2. Formation of boron-doped silicon wires and control of dopant concentration using zinc, SiCl4 and BCl3;Journal of Crystal Growth;2020-10

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