Author:
Hatakeyama T.,Ichinoseki K.,Fukuda K.,Higuchi N.,Arai K.
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Multi-beam coherent Fourier scatterometry;Measurement Science and Technology;2024-04-18
2. Coherent Fourier Scatterometry for Detection of Killer Defects on Silicon Carbide Samples;IEEE Transactions on Semiconductor Manufacturing;2024-02
3. Impact of Typical SiC Epilayer Defects on the Yield and Performance of 4H-SiC JBS Diodes;2023 20th China International Forum on Solid State Lighting & 2023 9th International Forum on Wide Bandgap Semiconductors (SSLCHINA: IFWS);2023-11-27
4. Defect Inspection Techniques in SiC;Nanoscale Research Letters;2022-03-04
5. Roughness, particle, and defect analysis of freeform surfaces;Optical Interference Coatings Conference (OIC) 2022;2022