Effect of substrate geometry on the deposition rate in chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference27 articles.
1. CVD growth of bulk polycrystalline ZnS and its optical properties
2. Transport phenomena in epitaxy systems;Jensen,1994
3. Two‐Dimensional Modeling of Low Pressure Chemical Vapor Deposition Hot Wall Tubular Reactors: I . Hypotheses, Methods, and First Results
4. Preparation and characterization of ZnS thin films produced by metalorganic chemical vapor deposition
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