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Epitaxial growth of barium titanate thin films on germanium via atomic layer deposition

  • Published:2017-10 Issue: Volume:476 Page:6-11
  • ISSN:0022-0248
  • Container-title:Journal of Crystal Growth
  • language:en
  • Short-container-title:Journal of Crystal Growth

Author:

Lin Edward L.,Posadas Agham B.,Wu Hsin Wei,Smith David J.,Demkov Alexander A.,Ekerdt John G.

Funder

Air Force Office of Scientific Research

National Science Foundation

Publisher

Elsevier BV

Subject

Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics

Reference50 articles.

1. Crystalline oxides on silicon: the first five monolayers;McKee;Phys. Rev. Lett.,1998

2. Integration of Functional Oxides with Semiconductors;Demkov,2014

3. Epitaxial perovskite thin films grown on silicon by molecular beam epitaxy;Yu;J. Vac. Sci. Technol., B,2000

4. Epitaxial oxide thin films on Si (001);Yu;J. Vac. Sci. Technol., B,2000

5. A chemical route to monolithic integration of crystalline oxides on semiconductors;McDaniel;Adv. Mater. Interfaces.,2014

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