Nitrogen doping of 3C-SiC thin films grown by CVD in a resistively heated horizontal hot-wall reactor
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Inorganic Chemistry,Condensed Matter Physics
Reference30 articles.
1. Site‐competition epitaxy for superior silicon carbide electronics
2. Nitrogen incorporation during 4H-SiC epitaxy in a chimney CVD reactor
3. Nitrogen doping of epitaxial silicon carbide
4. Predicted nitrogen doping concentrations in silicon carbide epitaxial layers grown by hot-wall chemical vapor deposition
5. Homoepitaxial growth of 4H–SiC and nitrogen doping by chemical vapor deposition
Cited by 42 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Impact of alternating precursor supply and gas flow on the LPCVD growth behavior of polycrystalline 3C-SiC thin films on Si;Sensors and Actuators A: Physical;2024-07
2. Ultra-Low Cte-Mismatch of 3c-Sic-On-Si Thin Films for High Temperature Mems Applications;2024
3. Effect of Growth Conditions on the Surface Morphology and Defect Density of CS‐PVT‐Grown 3C‐SiC;Crystal Research and Technology;2023-05-17
4. Impact of Alternating Precursor Supply and Gas Flow on the Lpcvd Growth Behavior of Polycrystalline 3c-Sic Thin Films on Si;2023
5. Impact of N Doping on 3C-SiC Defects;Materials Science Forum;2022-05-31
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3