Low defect density and planar patterned SOI materials by masked SIMOX-Reference-Cited by-同舟云学术

Low defect density and planar patterned SOI materials by masked SIMOX

Published:2003-09 Issue:5-6 Volume:378 Page:470-473
ISSN:0009-2614
Container-title:Chemical Physics Letters
language:en
Short-container-title:Chemical Physics Letters

Author:

Dong Yemin,Wang Xi,Wang Xiang,Chen Meng,Chen Jing

Publisher

Elsevier BV

Subject

Physical and Theoretical Chemistry,General Physics and Astronomy

Reference19 articles.

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5. A capacitor-less 1T-DRAM cell

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