Theoretical and experimental investigation of low-power AF-MPDT performance in the high mass flow rate low discharge current regime-Reference-Cited by-同舟云学术

Theoretical and experimental investigation of low-power AF-MPDT performance in the high mass flow rate low discharge current regime

Published:2019-01 Issue: Volume:159 Page:324-334
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Kitaeva Alena,Tang Haibin,Wang Baojun,Andreussi Tommaso^ORCID

Funder

Fundamental Research Program

National Science Foundation of China

Chinese Government Scholarship Council and Beihang University Administration

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

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