Cylindrical hot cathode ionisation gauge – The concept and simulations

Author:

Silva Ricardo A.S.ORCID,Bundaleski NenadORCID,Teodoro Orlando M.D.N.ORCID

Funder

Fundação para a Ciência e a Tecnologia

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference44 articles.

1. Vacuum metrology and its impact on research and industry: from state of the art measurements to future trends;Jousten;Vakuum Forsch. Praxis,2019

2. Sensitivity of hot cathode ionization gages;Tilford;J. Vac. Sci. Technol. A: Vacuum, Surfaces, and Films,1985

3. Comparison of some metrological characteristics of hot and cold cathode ionisation gauges;Li;Vacuum,2003

4. Nonstable behavior of widely used ionization gauges;Arnold;J. Vac. Sci. Technol. A: Vacuum, Surfaces, and Films,1994

5. Long-term stability of metal-envelope enclosed Bayard–Alpert ionization gauges;Fedchak;J. Vac. Sci. Technol. A: Vacuum, Surfaces, and Films,2012

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