Influence of silicon content on the microstructure, mechanical and tribological properties of magnetron sputtered Ti–Mo–Si–N films-Reference-Cited by-同舟云学术

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Influence of silicon content on the microstructure, mechanical and tribological properties of magnetron sputtered Ti–Mo–Si–N films

Published:2014-12 Issue: Volume:110 Page:47-53
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Xu Junhua,Ju Hongbo,Yu Lihua

Funder

National Natural Science Foundation of China

Research Innovation Program for College Graduates of Jiangsu Province

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference27 articles.

1. Deposition and characterization of Ti–Cx–Ny nanocomposite films by pulsed bias arc ion plating;Zhang;Vacuum,2014

2. Effects of Mo content on the microstructure and friction and wear properties of TiMoN films;Xu;Acta Metall Sin,2012

3. Microstructure, oxidation resistance, mechanical and tribological properties of Mo–Al–N films by reactive magnetron sputtering;Xu;Vacuum,2014

4. Wear resistant TiMoN coatings deposited by magnetron sputtering;Yang;Wear,2006

5. Superhard nanocrystalline composite materials: the TiN/Si3N4 system;Veprek;Appl Phys Lett,1995

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