Thin films of tetragonal zirconia (3Y–TZ) deposited by reactive sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference72 articles.
1. Thermal Barrier Coating System for Gas Turbine Application - A Review
2. Perspectives on the Development of Ceramic Composites for Cutting Tool Applications
3. Optical and electrochemical properties of cerium–zirconium mixed oxide thin films deposited by sol–gel and r.f. sputtering
4. Chemical vapour deposition of the oxides of titanium, zirconium and hafnium for use as high-k materials in microelectronic devices. A carbon-free precursor for the synthesis of hafnium dioxide
5. Electrical Characteristics of ZrO2Gate Dielectric Deposited on Ultrathin Silicon Capping Layer for SiGe Metal-Oxide-Semiconductor Device Applications
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1. Sol-Ageing Effect on the Structural and Optical Properties of Undoped and Doped ZrO2 Thin Films;Protection of Metals and Physical Chemistry of Surfaces;2022-10
2. Influence of Sol Concentration on the Properties of Spin Coated Zirconia Thin Films;IOP Conference Series: Materials Science and Engineering;2015-02-17
3. Sputtered YSZ based protective thin films for SOFCs;Surface Engineering;2010-11
4. Flow and Temperature Effect on Thin Films of Yttria-Stabilized Zirconia by Sputtering.;Microscopy and Microanalysis;2009-07
5. Behavior of 3mol% yttria-stabilized tetragonal zirconia polycrystal film prepared by slurry spin coating;Journal of Power Sources;2009-01
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