Influence of mixture compositions on ion energy distributions in Ar/N2 electron cyclotron resonance plasma-Reference-Cited by-同舟云学术

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Influence of mixture compositions on ion energy distributions in Ar/N2 electron cyclotron resonance plasma

Published:2015-09 Issue: Volume:119 Page:174-178
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Zhang Y.C.,Xie X.H.,Li H.,Yang K.,Tang Z.L.,Zhu X.D.

Funder

Natural Science Foundation of China

National Magnetic Confinement Fusion Science

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference20 articles.

1. Nitriding of zirconium and aluminium by using ECR nitrogen plasmas

2. Investigations of laser-sustained plasma and its role in laser nitriding of titanium

3. Nitridation of high speed steel by electron cyclotron resonance plasma

4. Synthesis of ultrafine gallium nitride powder by the direct current arc plasma method

5. Synthesis of nanowires and nanoparticles of cubic aluminium nitride

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modeling of plasma density, argon ion energy and ion velocity functions in a dipolar electron cyclotron resonance plasma source;Vacuum;2020-04

2. Observation of multi-mode ion waves in electron cyclotron resonance plasma;Physics of Plasmas;2019-08

3. Control of Ion Species and Energy in High-Flux Helicon-Wave-Excited Plasma Using Ar/N2 Gas Mixtures;IEEE Transactions on Plasma Science;2018-04

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