Effect of substrate bias voltage on structural and mechanical properties of pulsed DC magnetron sputtered TiN–MoSx composite coatings
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference32 articles.
1. A comparison of oxidation and oxygen substitution in MoS2 solid film lubricants;Fleischauer;Trib Int,1999
2. Low-friction TiN–MoS2 coatings produced by dc magnetron co-deposition;Gilmore;Surf Coat Technol,1998
3. The deposition of low-friction TiN–MoSx hard coatings by a combined arc evaporation and magnetron sputter process;Goller;Surf Coat Technol,1999
4. Deposition of magnetron sputtered TiN+MoSx coating with Ti–TiN graded interlayer;Rahman;Surf Coat Technol,2005
5. Pulsed DC magnetron sputtered MoSx–TiN composite coating for improved mechanical properties and tribological performance;Gangopadhyay;Surf Coat Technol,2009
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