Author:
Abolmasov S.N.,Muta H.,Kawai Y.
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference7 articles.
1. Investigation of a low pressure penning discharge
2. Wasa K, Hayakawa S. Handbook of sputter deposition technology: principles, technology and applications. Westwood: Noyes; 1992. p. 93–95.
3. Low-pressure magnetron sputtering
4. Development of a hybrid PIG-ECR ion source
5. Principles of plasma discharges and materials processing;Lieberman,1994
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献