Radio frequency powered spiral hollow cathodes
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference17 articles.
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2. Radio frequency hollow cathodes for the plasma processing technology;Bárdos;Surf. Coating. Technol.,1996
3. Coil hollow cathode for metal vapor lasers;Grozeva;Optic Commun.,1982
4. Some modifications of hollow cathode and their application;Dyulgerova;Opt. Appl.,1983
5. Spiral hollow-cathode plasma-assisted diamond deposition;Tzeng;Appl. Phys. Lett.,1988
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