Structure of RF fields in a twin-chamber radio-frequency inductive plasma source placed in a weak external magnetic field-Reference-Cited by-同舟云学术

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Structure of RF fields in a twin-chamber radio-frequency inductive plasma source placed in a weak external magnetic field

Published:2020-11 Issue: Volume:181 Page:109634
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Petrov A.K.^ORCID,Kralkina E.A.,Nikonov A.M.,Vavilin K.V.,Zadiriev I.I.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference58 articles.

1. Plasma production using a standing helicon wave;Boswell;Phys. Lett.,1970

2. Very efficient plasma generation by whistler waves near the lower hybrid frequency;Boswell;Plasma Phys. Contr. Fusion,1984

3. Effect of boundary conditions on radial mode structure of whistlers;Boswell;Plasma Phys.,1984

4. Helicon plasma sources;Chen,1996

5. Helicon discharges and sources: a review;Chen;Plasma Sources Sci. Technol.,2015

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1. Axial Dependence of the Longitudinal RF Magnetic Field and Plasma Parameters in an Inductive Plasma Source with an External Magnetic Field;Plasma Physics Reports;2022-11

2. On the Spectra of Natural Waves in a Plasma Waveguide in the Presence of Collisions;Plasma Physics Reports;2022-04

3. On the spectra of natural waves in a plasma waveguide in the presence of collisions;Applied Physics;2021-09-23

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