Pumping performance analysis on turbomolecular pump-Reference-Cited by-同舟云学术

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Pumping performance analysis on turbomolecular pump

Published:2012-02 Issue:7 Volume:86 Page:830-832
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Hsieh Fan-Chun,Lin Ping-Hung,Liu Da-Ren,Chen Fong-Zhi

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference8 articles.

1. Spiral grooved vacuum pump working in high pressure ranges

2. Vacuum science and technology-pioneers of the 20th century;Hablanian;AIP,1994

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1. Study on the Pumping Performance and Structure Parameters Optimization of High-Speed Small Compound Molecular Pump;Micromachines;2024-05-29

2. Uncertainty propagation analysis of the computed ITER torus effective pumping speed during the dwell phase;Vacuum;2022-09

3. Effect of substrate temperature on the near-infrared shielding properties of WO3-x thin films deposited by RF magnetron sputtering;Vacuum;2022-08

4. The Pumping Performance of a Multiport Hybrid Molecular Pump and Its Effect on the Inspection Performance of a Helium Mass Spectrometer Leak Detector;Applied Sciences;2022-06-30

5. Multidisciplinary Design Strategies for Turbomolecular Pumps With Ultrahigh Vacuum Performance;IEEE Transactions on Industrial Electronics;2019-12

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