Fabrication of high frequency ZnO thin film SAW devices on silicon substrate with a diamond-like carbon buffer layer using RF magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference14 articles.
1. Speeding-up effects of hard carbon films on surface acoustic wave on crystalline quartz
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4. Exact analysis of dispersive SAW devices on ZnO/diamond/Si-layered structures
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