Influence of CH4 fraction on the composition, structure, and internal stress of the TiCN coatings deposited by LAFAD technique
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference19 articles.
1. Deposition, properties and performance behaviour of carbide and carbonitride PVD coatings
2. Analysis of wear behaviour of titanium carbonitride coatings
3. Oxidation and wear behaviors of Ti-based thin films
4. Optical emission spectroscopy of active species in a TiCN PVD arc discharge
5. Ion-plated titanium carbonitride films
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