Post-annealing properties of aluminum-doped zinc oxide films fabricated by ion beam co-sputtering-Reference-Cited by-同舟云学术

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Post-annealing properties of aluminum-doped zinc oxide films fabricated by ion beam co-sputtering

Published:2013-01 Issue: Volume:87 Page:227-231
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Chen Yu-Yun,Wang Paul W.,Hsu Jin-Cherng,Lee Chun-Yi

Funder

Key Industrial and Academic Cooperation Research Project of Science and Engineering College of Fu-Jen Catholic University

Sapintia Culture and Education Foundation

National Science Council

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference27 articles.

1. Effects of substrate on the structural, electrical and optical properties of Al-doped ZnO films prepared by radio frequency magnetron sputtering;Li;Thin Solid Films,2009

2. Effects of substrate position and oxygen gas flow rate on the properties of ZnO-Al films prepared by reactive co-sputtering;Horwat;Thin Solid Films,2007

3. Room-temperature deposition of transparent conducting Al-doped ZnO films by RF magnetron sputtering method;Yang;Appl Surf Sci,2009

4. Effect of thickness on structural electrical and optical properties of ZnO-Al films deposited by pulsed laser deposition;Dong;J Appl Phys,2007

5. Structure and properties of transparent conductive doped ZnO films by pulsed laser deposition;Park;Appl Surf Sci,2006

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1. Inducing Efficient Photoelectric Properties at AZO/Ag/AZO Nanomultilayer Films;Crystal Growth & Design;2024-02-15

2. Effect of calcination temperature on phase composition and optical properties of Al-ZnO nanocrystalline films;Physica Scripta;2023-07-19

3. Effect of post annealing on the properties of aluminium doped Zinc oxide thin films deposited by DC sputtering;Materials Today: Proceedings;2021

4. Electro-Optical Properties of AZO Thin Films with Deposition & Heat treatment Conditions;Korean Journal of Materials Research;2020-10-31

5. Nanostructure characteristics of Bi2O3:Al2O3 thin films and the annealing temperature effect on morphological, optical, and mechanical properties;Superlattices and Microstructures;2020-10

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