Structural and optical properties of yttrium trioxide thin films prepared by RF magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference23 articles.
1. Durable 3–5 μm transmitting infrared window materials
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3. Properties of high κ gate dielectrics Gd2O3 and Y2O3 for Si
4. Optical properties of durable oxide coatings for infrared applications
5. Effects on surface morphology of epitaxial Y2O3 layers on Si (001) after postgrowth annealing
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