Experimental verification of model for prediction of coating composition deposited by sputtering using mosaic target in nitrogen
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference31 articles.
1. Structural and quantitative analysis of stainless steel coatings deposited by DC-magnetron sputtering in a reactive atmosphere
2. Wear studies of (Ti–Al)N coatings deposited by reactive magnetron sputtering
3. Pulsed DC titanium nitride coatings for improved tribological performance and tool life
4. New approaches to plasma enhanced sputtering of advanced hard coatings
5. Titanium aluminum nitride films: A new alternative to TiN coatings
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1. Effect of nitrogen on the properties of nanostructured zinc nitride heterojunction prepared by reactive magnetron sputtering;Materials Science in Semiconductor Processing;2022-07
2. Prediction of coating composition using composite target reactive sputtering and experimental verification;PROCEEDINGS OF THE 14TH ASIA-PACIFIC PHYSICS CONFERENCE;2021
3. Effect of Sputtering Current on the Structure of TiCrN Thin Films Prepared from Mosaic Target by Reactive DC Magnetron Sputtering;Applied Mechanics and Materials;2020-08
4. Effect of cathode composition and nitrogen pressure on macroparticle generation and type of arc discharge in a DC arc source with Ti–Al compound cathodes;Surface and Coatings Technology;2015-11
5. Structure and properties of tribological coatings in Cu-B system;The Physics of Metals and Metallography;2014-07
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