Effect of electron beam irradiation on structure and properties of SiCN thin films prepared by plasma assisted radio frequency magnetron sputtering

Author:

Li W.L.,Zhang Z.G.,Yang J.L.,Fei W.D.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference15 articles.

1. Prediction of new low compressibility solid;Liu;Science,1989

2. Structural properties and electronic structure of low compressibility materials:β-Si3N4 and hypotheticalβ - C3N4;Liu;Phys Rev B,1990

3. Effect of silicon impurity on carbon nitride films prepared by microwave plasma chemical vapor deposition;Zhang;Mater Sci Eng B,2001

4. Influence of chemical sputtering on the composition and bonding structure of carbon nitride films;Alvarez;Thin Solid Films,2001

5. Gas evolution studies for structural characterization of hydrogenated carbon nitride samples;Rodil;Diamond Relat Mater,2003

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