Effects of sputtering pressure and Al buffer layer thickness on properties of AZO films grown by rf magnetron sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference13 articles.
1. Comparison of the properties for ZnO:Al films deposited on polyimide and glass substrates
2. Improvement in the crystallinity of ZnO thin films by introduction of a buffer layer
3. Electrical and optical studies of ZnO:Ga thin films fabricated via the sol–gel technique
4. Electrical and optical properties of ZnO:Al film prepared on polyethersulfone substrate by RF magnetron sputtering
5. Growth of Al-doped ZnO thin films by pulsed DC magnetron sputtering
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