Carbon films deposited by MCECR plasma sputtering
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference10 articles.
1. Mechanical and tribological properties of amorphous carbon films deposited on implanted steel substrates;Shum;Thin Solid Films,2004
2. AFM observations of DLC films prepared by the ECR sputtering method;Kamijo;Nucl Instrum Methods Phys Res Section B: Beam Interactions Mater Atoms,1997
3. Ultra-thin carbon layer for high density magnetic storage devices;Casiraghi;Diamond Related Mater,2004
4. Optical and electrical properties of amorphous carbon films deposited using filtered cathodic vacuum arc with pulse biasing;Sze;Thin Solid Films,2004
5. Tribological characteristics of highly wear-durable ECR-sputtered carbon film;Yajima;Surf Coatings Technol,2003
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1. The Effects of Diamond-Like Carbon Films on Fretting Wear Behavior of Orthodontic Archwire-Bracket Contacts;Journal of Nanoscience and Nanotechnology;2015-06-01
2. Cross-linked graphene layer embedded carbon film prepared using electron irradiation in ECR plasma sputtering;Surface and Coatings Technology;2011-12
3. NANOSTRUCTURED CARBON NITRIDE FILMS DEPOSITED USING THE LOW-COST PENNING DISCHARGE PLASMA-SPUTTERING TECHNIQUE;International Journal of Modern Physics B;2008-09-20
4. Surfactant-assisted fabrication of free-standing inorganic sheets covering an array of micrometre-sized holes;Nature Materials;2007-08-05
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