Investigation of high transparent and conductivity of IGZO/Ag/IGZO sandwich structures deposited by sputtering method-Reference-Cited by-同舟云学术

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Investigation of high transparent and conductivity of IGZO/Ag/IGZO sandwich structures deposited by sputtering method

Published:2019-07 Issue: Volume:165 Page:305-310
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Yuan Zhan-Sheng,Wu Chia-Ching,Tzou Wen-Cheng,Yang Cheng-Fu,Chen Yu-Hsin

Funder

Ministry of Science and Technology

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference42 articles.

1. Transparent conducting impurity-co-doped ZnO:Al thin films prepared by magnetron sputtering;Minami;Thin Solid Films,2001

2. Organic thin-film transistors with nanocomposite dielectric gate insulator for polymer electroluminescent devices;Chen;Appl. Phys. Lett.,2004

3. Effect of the duty ratio on the indium tin oxide (ITO) film deposited by in-line pulsed DC magnetron sputtering method for resistive touch panel;Ahn;Appl. Surf. Sci.,2011

4. Electrical and optical properties of ZnO:Al film prepared on polyethersulfone substrate by RF magnetron sputtering, Colloids and Surfaces A:;Lin;Physicochem. Eng. Aspects,2009

5. Effect of deposition parameters and annealing temperature on the structure and properties of Al doped ZnO thin films;Hsu;Mater. Chem. Phys.,2010

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