Atomic oxygen in remote plasma of radio-frequency hollow cathode discharge source: Characterization and efficiency
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference40 articles.
1. Techniques and application of plasma chemistry;Hollahan,1974
2. Preparation and optical properties of plasma polymer silver composite films
3. Oxygen plasma etching for resist stripping and multilayer lithography
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