A comparative analysis of a-C:H films deposited from five hydrocarbons by thermal desorption spectroscopy
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference32 articles.
1. Diamond-like amorphous carbon
2. Bonding in hydrogenated diamond-like carbon by Raman spectroscopy
3. Comparative experimental analysis of the a-C:H deposition processes using CH4 and C2H2 as precursors
4. Gas evolution from hydrogenated amorphous carbon films
5. Mechanical properties ofa‐C:H films prepared by plasma decomposition of C2H2
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