Simulation to improve the magnetic field in the straight section of the rectangular planar DC magnetron
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference27 articles.
1. Prediction of the evolution of the erosion profile in a direct current magnetron discharge
2. An anomalous erosion of a rectangular magnetron system
3. A cross-corner effect in a rectangular sputtering magnetron
4. Liu XY. Master degree dissertation, Tsinghua University, Beijing, 2004.
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