Effect of the thermal annealing on the properties of RF sputtered Mo-AlNxOy composite thin films-Reference-Cited by-同舟云学术

Effect of the thermal annealing on the properties of RF sputtered Mo-AlNxOy composite thin films

Published:2016-07 Issue: Volume:129 Page:115-121
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Braga Thyago Santos,Massi Marcos,Duarte Diego Alexandre,Silva Sobrinho Argemiro Soares,Alves Cardoso Guilherme Wellington,Pereira Fabiano Pinto,Barros Machado João Paulo,Otani Choyu

Funder

National Counsel of Technological and Scientific Development (CNPq)

São Paulo Research Foundation

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference35 articles.

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3. Microwave synthesis of aluminum oxynitride (ALON);Cheng;J. Mater. Sci. Lett.,1999

4. Analysis of multifunctional titanium oxycarbide films as a function of oxygen addition;Chappé;Surf. Coatings Technol.,2012

5. AlNxOy thin films deposited by DC reactive magnetron sputtering;Borges;Appl. Surf. Sci.,2010

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