Computational fluid dynamics simulation study of gas flow in dry scroll vacuum pump-Reference-Cited by-同舟云学术

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Computational fluid dynamics simulation study of gas flow in dry scroll vacuum pump

Published:2015-06 Issue: Volume:116 Page:144-152
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Yue Xiang-Ji,Lu Yan-jun,Zhang Ying-Li,Ba De-chun,Wang Guang-Yu,Zhang Zhen-hou

Funder

Doctoral Start-up Foundation of Liaoning Province

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference12 articles.

1. Six years of dry pumping: a review of experience and issues;Troup;J Vac Sci Technol A Vac Surf Films,1991

2. Dry vacuum pumps for semiconductor process: guidelines for primary pump selection;Lessard;J Vac Sci Technol A Vac Surf Films,2000

3. Theoretical study on the pumping mechanism of a dry scroll vacuum pump;Su;Vacuum,1996

4. Experimental verification of theory for the pumping mechanism of a dry-scroll vacuum pump;Sawada;Vacuum,1999

5. Theoretical and experimental study of dry scroll vacuum pump;Li;Vacuum,2010

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