Effects of bias voltage and substrate temperature on the mechanical properties and oxidation behavior of CrSiN films-Reference-Cited by-同舟云学术

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Effects of bias voltage and substrate temperature on the mechanical properties and oxidation behavior of CrSiN films

Published:2021-12 Issue: Volume:194 Page:110580
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Chang Li-Chun^ORCID,Sung Ming-Ching,Chen Yung-I^ORCID

Funder

National Central University

Ministry of Science and Technology, Taiwan

National Tsing Hua University

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference55 articles.

1. Electrical, optical and mechanical properties of sputtered CrNy and Cr1−xSixN1.02 thin films;Martinez;Thin Solid Films,2004

2. Synthesis and mechanical properties of Cr–Si–N coatings deposited by a hybrid system of arc ion plating and sputtering techniques;Park;Surf. Coating. Technol.,2004

3. Influence of silicon addition on the oxidation resistance of CrN coatings;Thobor-Keck;Surf. Coating. Technol.,2005

4. Mechanical and tribological properties of Cr–N and Cr–Si–N coatings reactively sputter deposited;Mercs;Surf. Coating. Technol.,2005

5. The synthesis of CrSiN film deposited using magnetron sputtering system;Lee;Surf. Coating. Technol.,2005

Cited by 14 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influence of synchronized pulse bias on the Microstructure and Properties of CrSiN nano-composite ceramic films deposited by MIS-HiPIMS;Ceramics International;2024-09

2. Microstructure, mechanical properties, and wear behaviors of CrSiN films on oxynitriding-treated Vanadis 60 high-speed steel by the direct current magnetron sputtering process;Thin Solid Films;2024-07

3. Effects of thickness ratio on phase structures, mechanical properties, and wear behaviors of CrN/ZrB2 bilayer films;Surface and Coatings Technology;2024-04

4. Microstructural and Mechanical Properties of Cr-Ni3Al Alloy Films Synthesized by Magnetron Sputtering;Journal of Materials Engineering and Performance;2023-11-10

5. TiMoTa multi-component transition layer: Plasma in-situ diagnosis, mechanical properties and effect on diamond adhesion;Surface and Coatings Technology;2023-11

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