Impact of deposition temperature on microstructure and properties of erbium oxide antireflective films deposited on CVD diamond substrates

Author:

Huang Yabo,Chen Liangxian,Shao Siwu,Zhu Xiaohua,Huang Ke,An Kang,Zheng Yuting,Liu Jinlong,Wei Junjun,Li ChengmingORCID

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference39 articles.

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3. Characterization and thermal shock behavior of Y2O3 films deposited on freestanding CVD diamond substrates;Hua;Appl. Surf. Sci.,2016

4. Properties and anti-reflection performance of Y2O3 films with different crystal structures on diamond;Chen;Surf. Technol.,2019

5. Transition metal oxide anti-reflection coatings for airborne diamond optics;Mollart;Diam. Relat. Mater.,2001

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