Characteristics of capacitively coupled helium plasma driven by various frequencies under constant power conditions
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference28 articles.
1. Frequency effects in silane plasmas for plasma enhanced chemical vapor deposition
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3. Influence of Excitation Frequency on the Electron Distribution Function in Capacitively Coupled Discharges in Argon and Helium
4. Electron energy distribution functions measured by Langmuir probe with optical emission spectroscopy in very high frequency capacitive discharge in nitrogen
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1. The discharge characteristics of low-pressure capacitively coupled argon plasma with Langmuir probe;Physics Letters A;2022-02
2. Discharge characteristic of very high frequency capacitively coupled argon plasma*;Chinese Physics B;2021-09-01
3. Driving frequency effect on discharge parameters and higher harmonic generation in capacitive discharges at constant power densities;Journal of Physics D: Applied Physics;2020-11-18
4. Measurement of F−, O−and ${\rm CF}_{3}^{-}$ densities in 60 and 100 MHz asymmetric capacitively coupled plasma discharge produced in an Ar/O2/C4F8gas mixture;Journal of Physics D: Applied Physics;2017-07-27
5. Experimental investigations of driving frequency effect in low-pressure capacitively coupled oxygen discharges;Journal of Applied Physics;2015-04-14
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